Helium ion nanofabrication and microscopy equipment. Cryo-HIM

This microscope, acquired by CSIC in 2022, is considered to be the most powerful ultra-high resolution imaging and nanofabrication tool currently available. It has a unique and singular configuration at European level. It has three ion beams, Helium, Neon and Gallium, making it possible to use one or the other depending on the target. Specifically, the helium beam makes it possible to fabricate structures below 10 nm with a resolution of less than 0.5 nm.
The Orion Nanofab has an advanced and specific software for pattern design and application, NanoPatterning and Visualization Engine (NPVE). It also features a charge neutralizer that emits low-voltage electrons (Flood gun) to compensate the positive charge of semiconductor or insulator samples, facilitating their visualization.

Postal address

INMA
Facultad de Ciencias
Universidad de Zaragoza
C/ Pedro Cerbuna, 12
50009 Zaragoza

Technical Staff

Fees

Este sitio web utiliza cookies para que usted tenga la mejor experiencia de usuario. Si continúa navegando está dando su consentimiento para la aceptación de las mencionadas cookies y la aceptación de nuestra política de cookies

ACEPTAR
Aviso de cookies