Home » Scientific-Technical Services available at the Institute » Helium ion nanofabrication and microscopy equipment (Cryo-HIM)
This microscope, acquired by CSIC in 2022, is considered to be the most powerful ultra-high resolution imaging and nanofabrication tool currently available. It has a unique and singular configuration at European level. It has three ion beams, Helium, Neon and Gallium, making it possible to use one or the other depending on the target. Specifically, the helium beam makes it possible to fabricate structures below 10 nm with a resolution of less than 0.5 nm.
The Orion Nanofab has an advanced and specific software for pattern design and application, NanoPatterning and Visualization Engine (NPVE). It also features a charge neutralizer that emits low-voltage electrons (Flood gun) to compensate the positive charge of semiconductor or insulator samples, facilitating their visualization.
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INMA
Facultad de Ciencias
Universidad de Zaragoza
C/ Pedro Cerbuna, 12
50009 Zaragoza
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In addition to these features, the following modular complements have been acquired and adapted to maximize the possibilities of use of this instrument, as well as the nature of the study materials.
– Cryo module (Quorum PP3010 cryo system): Maximum cooling temperature -190 ºC. Especially useful for soft samples. Allows low temperature fracturing. In conjunction with the gas injector allows the induced deposition of precursors, under cryogenic conditions, with 3 different ions (Cryo-FIBID).
– Precursor Injection System (Gas Injection System, Oxford): W, Pt and XeF2.
Allows the formation of deposits for structure protection, structure connection, direct writing processes of nanostructures or massive material removal.
– 4-microneedle station (Kleindiek): Enables electrical measurements of micro/nanostructures inside the microscope. They can also be used as nanomanipulators.
– Micro-heating/cooling plate (Kleindiek): Working temperature range from -55 to 125ºC. It allows working with the same material, at very varied and/or controlled temperatures to improve or study processes directly related to this property.
The use of these complements can be combined, which makes this equipment a particularly versatile microscopy and nanofabrication tool.

Campus San Francisco, Facultad de Ciencias
C/ Pedro Cerbuna, 12 – 50009 Zaragoza (España)
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